A brief introduction of Micro - Sensors

This course introduces students to the exciting world of micro- and nano-scale devices that are widely used in modern technology. It explains the basic concepts of Micro-Electro-Mechanical Systems (MEMS) and Nano-Electro-Mechanical Systems (NEMS) in a clear and simple way. Students will learn how tiny sensors and devices are designed to sense, measure, and control physical quantities. The course covers the working principles of common micro and nano devices used in areas such as electronics, healthcare, automotive systems, and industrial applications. Learners will also understand how these devices are analyzed for performance, reliability, and efficiency. Basic techniques used to characterize micro and nano systems are discussed, along with an introduction to standard MEMS fabrication processes like lithography, etching, and deposition. Real-world examples are included to help connect theory with practical applications. By the end of the course, students will have a clear understanding of how micro and nano devices are created and used, and they will gain a strong foundation for advanced studies and research in micro and nano technologies.

Source: NPTEL - NOC IITM